This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies — nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
The idea for this book germinated in the classroom of Bell Laboratories, both
at AT&T and Lucent Technologies, where I taught and organized several
courses on reliability and failure of electronics over the past decade. Distilling
the essence of the vast scattered information on this subject, first for course
purposes and then into the text and figures that have emerged between these
covers, would not have been possible without the resources of Bell Labs and
the generous assistance of some very special people. Of these, two of my dear
friends, Lucian (Lou) Kasprzak and Frank Nash, must be acknowledged first.
Lou, an early observer of transistor hot-electron effects at IBM, is a member of
the board of directors of the IEEE International Reliability Physics Symposia,
while Frank, an expert in laser reliability at Bell Labs, wrote the incisive book.
Estimating Device Reliability: Assessment of Credibility, Kluwer, (1993). Both
stimulated my thinking on the direction of the book and helped me to acquire
the research literature that was indispensable to its writing. Importantly, they
dispelled some of my naivete about reliability, and helped me to fashion a credible philosophy of the subject, something acquired only after lengthy grappling
with the issues.
Students enrolled in courses for which books are simultaneously being written often leave their imprint on them. This is true of several of the students in
the Stevens Institute-Bell Laboratories on-premises graduate program. Therefore, I want to thank both Gary Steiner and Jeff Murdock for critiquing various
versions of the text. Gary additionally reviewed the exercises and enhanced the
quality of several figures; Jeff assured me that the text was “Murdock-proof.”
The best photographs result from wellexposed, well-composed, properly processed images. This book is not intended to be a camera or software manual which expounds on…